Process Variations in Microsystems Manufacturing

Process Variations in Microsystems Manufacturing

Huff, Michael

Springer Nature Switzerland AG

03/2020

530

Dura

Inglês

9783030405588

Pré-lançamento - envio 15 a 20 dias após a sua edição

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Introduction.- Overview of Microsystems Manufacturing.- Process Variations in Microsystems Processing Steps.- Microsystems Metrology Methods and Associated Errors.- Process Integration and Variations in Material Properties.- Device Parameter Variations in Microsystems Manufacturing.- Quality Assurance and Control Methods Used in Microsystems Manufacturing.- Design Methods for Handling Process Variations.- Future Methods for Improved Microsystems Manufacturing Process Variations.

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